Titanium Target Introduction
A titanium target (Ti target) is a high-purity titanium or titanium alloy disc/plate used in Physical Vapor Deposition (PVD) processes, such as sputtering and evaporation, to deposit thin films in industries like semiconductors, displays, solar panels, and medical devices.
1.Details of titanium target
|
Standard |
ASTM B381 |
|
Grade |
GR1/GR2/GR3/GR5/GR7/GR12 |
|
Dimension |
Thickness (1mm-500mm) × Outside diameter (max.600mm) DN10--DN2000 |
|
Surface condition |
Surface quality: The surface roughness Ra of the two end surfaces should not be greater than 3.2lμm (which meets the requirements of ultrasonic inspection), and the surface roughness Ra of the inner and outer sides should not be greater than 12.5μm (when ultrasonic inspection is required on the outer circumferential surface Ra should not be greater than 3.2 μm), and the chamfer radius is 5 to 15 mm. Surface finish: clean, dust-free, better acid-resistant life. |
|
Types |
Testing: mechanical properties, chemical composition testing, ultrasonic testing. |
|
Packaging & Delivery
|
Packaging Details standard export package, wooden case or according to customer's request Port Tianjin port, Qingdao, shanghai Lead Time : Quantity(Kilograms) 1 - 500 >500 Est. Time(days) 15 To be negotiated |
|
Quality Assurance |
According to globally recognized standards, such as ASTM. Chemical composition, Mechanical properties, Microstructure are strictly controlled. The Third Party Quality Test Certificate---Baoti Group ISO Quality Management System Guarantee of refund, replacement within 30 days. |
2. Chemical composition of titanium target
|
Grade |
N |
C |
H |
Fe |
O |
Al |
V |
Pd |
Mo |
Ni |
Ti |
|
Gr1 |
0.03 |
0.08 |
0.015 |
0.20 |
0.18 |
/ |
/ |
/ |
/ |
/ |
Balance |
|
Gr2 |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
/ |
/ |
/ |
/ |
/ |
Balance |
|
Gr5 |
0.05 |
0.08 |
0.015 |
0.40 |
0.20 |
5.5-6.75 |
3.5- 4.5 |
/ |
/ |
/ |
Balance |
|
Gr7 |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
/ |
/ |
0.12-0.25 |
/ |
/ |
Balance |
|
Gr12 |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
/ |
/ |
/ |
0.2-0.4 |
0.6-0.9 |
Balance |
|
Gr23 |
0.03 |
0.08 |
0.012 |
0.25 |
0.13 |
5.5-6.5 |
3.5-4.5 |
/ |
/ |
/ |
Balance |
3.Mechanical properties of titanium target
|
Grade |
Tensile Strength, Min MPa |
Yield Strength Min MPa |
Elongation in 4D,Min, % |
Reduction of Area, min % |
|
Gr1 |
240 |
138 |
24 |
30 |
|
Gr2 |
345 |
275 |
20 |
30 |
|
Gr3 |
450 |
380 |
18 |
30 |
|
Gr5 |
895 |
828 |
10 |
25 |
|
Gr7 |
345 |
275 |
20 |
30 |
|
Gr12 |
483 |
345 |
18 |
25 |
|
Gr23 |
828 |
759 |
10 |
15 |
4.The development of titanium target
.
Future Trends
Larger targets for Gen 10.5+ displays
Recyclable targets to reduce costs
Nano-structured Ti films for advanced electronics
Titanium targets are essential for high-tech industries, offering superior thin-film performance. Advances in purity, size, and sustainability will drive future growth.
Major Applications
Semiconductors
Semiconductors → Ti/TiN barrier layers (prevent Cu diffusion in chips)
Displays (OLED/LCD)
Displays (OLED/LCD) → Transparent conductive films (improves touch sensitivity)
Solar Panels
Solar Panels → Anti-reflective & conductive coatings (boosts efficiency)
Medical Implants
Medical Implants → Biocompatible coatings (enhances durability)
FAQ
1. How are titanium targets manufactured?
Vacuum melting (high-purity Ti)
Hot forging/rolling (dense microstructure)
Precision machining (custom shapes/sizes)
Bonding (to Cu/Al backing plates if required)
2. What are the key quality standards?
Purity: ≥99.95% (4N5) for general use; ≥99.999% (5N5) for semiconductors.
Density: >98% theoretical density (reduces arcing during sputtering).
Grain size: <50µm (ensures uniform film deposition).
3. What's the lifespan of a titanium target?
Depends on usage but typically 6–24 months under proper conditions (low-power sputtering, regular maintenance).
4. Can titanium targets be recycled?
Yes! >90% of scrap Ti targets can be reprocessed into new targets after purification.
5. How to store titanium targets?
Sealed in argon gas to prevent oxidation.
Avoid humidity (store in dry environments).
6. Future trends?
Larger targets for Gen 10.5+ displays.
Nano-structured Ti films for advanced electronics.
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